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发明名称
SCANNING ELECTRONIC MICROSCOPE
摘要
申请公布号
JPS5244158(A)
申请公布日期
1977.04.06
申请号
JP19750118867
申请日期
1975.10.03
申请人
HITACHI LTD
发明人
NAGATANI TAKASHI;YAMADA MITSUHIKO
分类号
H01J37/22;H01J37/244;H01J37/28
主分类号
H01J37/22
代理机构
代理人
主权项
地址
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