| 发明名称 |
LSI MASK INSPECTION DEVICE |
| 摘要 |
PURPOSE:To turn pattern information of original pictures to digital information and operate the same together with the information signals of data thereby making possible the cross-reference inspection of the original pictures and the data. |
| 申请公布号 |
JPS5244171(A) |
申请公布日期 |
1977.04.06 |
| 申请号 |
JP19750119711 |
申请日期 |
1975.10.06 |
| 申请人 |
NIPPON TELEGRAPH & TELEPHONE |
发明人 |
HATSUTORI SANSHIROU;SHIMADA HISANORI;AKITANI MASAHIRO |
| 分类号 |
H01L21/66;G01N21/88;G01N21/94;G01N21/956;G03F1/84;H01L21/027;H01L21/302 |
主分类号 |
H01L21/66 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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