PLASMA TREATMENT DEVICE,申请号JP19750119769-传众专利搜索

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发明名称	PLASMA TREATMENT DEVICE
摘要
申请公布号	JPS5244174(A)	申请公布日期	1977.04.06
申请号	JP19750119769	申请日期	1975.10.06
申请人	HITACHI LTD	发明人	OIMOTO HISASHI
分类号	H01L21/205;H01L21/302;H01L21/3065;H01L21/31	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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