Process for the preparation of low silanes and silane esters

摘要

A process for preparing monosilane and low silane esters thereof which comprises contacting a hydrogen silane ester of the formula HxSi(OR)4-x, wherein R represents an alkyl or alkoxyalkyl moiety and x is 1, 2 or 3, with a catalyst of an element of the first group and/or the second or third main or secondary group of the periodic system or iron or manganese or and organic nitrogen compound under distillation conditions and recovering a product having the formula Hx+1Si(OR)4-x-1 and/or a product of the formula Hx-1Si(OR)4-x+1.