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发明名称
PROCEDE POUR FABRIQUER UN SYSTEME PLANAR DE VOIES CONDUCTRICES POUR DES CIRCUITS INTEGRES A SEMI-CONDUCTEURS
摘要
申请公布号
FR2323230(A1)
申请公布日期
1977.04.01
申请号
FR19760026378
申请日期
1976.09.01
申请人
SIEMENS AG
发明人
分类号
H01L21/3205;H01L21/306;H01L21/316;H01L21/768;(IPC1-7):H01L21/88
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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