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发明名称
摘要
申请公布号
FR2156016(B1)
申请公布日期
1977.04.01
申请号
FR19720035130
申请日期
1972.10.04
申请人
SIEMENS AG
发明人
分类号
H01L21/311;H01L23/485;(IPC1-7):01L7/00
主分类号
H01L21/311
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