Schottky barrier thin film semiconductor - for solar cells, produced by ionized agglomerate vapour deposition

摘要

A substrate has on its surface a monocrystalline semiconductor thin film, such as a film of p- or n-type silicon. deposited from the vapour at 10-2 to several Torr press. after heating to a high temp. Injector nozzle spray the vapour into a vacuum chamber which is held at under 1/100th of the above press. Atom agglomerates, produced by supercooling are ionized by a thermion emission wire. A battery produces an accelerating electric field for the atoms to impinge on the substrate surface. This results in semiconductor devices of high quality and yield. It has a low weight, is easily handled and partic suitable for use in solar battery cells.