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发明名称
SPECTROSCOPIC AUTOELLIPSOMETER
摘要
申请公布号
JPS5240388(A)
申请公布日期
1977.03.29
申请号
JP19750115644
申请日期
1975.09.26
申请人
NIPPON KOUGAKU KOUGIYOU KK
发明人
KASAI TOSHIYUKI
分类号
G01J4/04;G01N21/21
主分类号
G01J4/04
代理机构
代理人
主权项
地址
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