发明名称 ELECTRODE STRUCTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To improve reliability for the shallow PN junction and to avoid deterioration in characteristics of schottky junction by making electrode duallayered structure of pure Al-Si alloy of specified thickness.
申请公布号 JPS5239372(A) 申请公布日期 1977.03.26
申请号 JP19750114783 申请日期 1975.09.25
申请人 HITACHI LTD 发明人 KIKUCHI AKIRA;IKEDA TAKAHIDE;SUZUKI MICHIO
分类号 H01L29/43;H01L21/28;H01L29/47;H01L29/872 主分类号 H01L29/43
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