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发明名称
METHOD OF PRODUCING IC
摘要
申请公布号
JPS5239386(A)
申请公布日期
1977.03.26
申请号
JP19760113195
申请日期
1976.09.22
申请人
SIGNETICS CORP
发明人
BUURUMI BORAATA
分类号
H01L21/20;H01L21/265;H01L21/266;H01L21/74
主分类号
H01L21/20
代理机构
代理人
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地址
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