发明名称 POLISHING METHOD
摘要 PURPOSE:To reduce the polishing scars generated on the polished surface of a polished article by instructing the stop of revolution of the upper and lower surface plates and instructing the stop of revolution of an internal gear and a sun gear after a prescribed internal gear and a sun gear after a prescribed time. CONSTITUTION:After a polished article 6 is polished, the switch of each driving motor is manually turned OFF at the same time, in order to stop the upper and lower surface plates 4 and 5, and after the upper and lower surface plates 4 and 5 actually stop, the switch of each driving motor for a sun gear 8 and an internal gear is manually turned OFF at the same time, and the revolution is brought into stop, and each revolution of a carrier 7 and the polished article 6 is stopped, and polishing is completed. Therefore, after the stop of the upper and lower surface plates 4 and 5, each revolution of the sun gear 8 and the internal gear 9 is stopped, and the revolution of the polished article 6 accommodated into the carrier 7 is suspended, and the polishing scars generated on the polished surface of the polished article 6 can be reduced.
申请公布号 JPS63300860(A) 申请公布日期 1988.12.08
申请号 JP19870136070 申请日期 1987.05.29
申请人 HOYA CORP 发明人 TAKAHASHI KOICHI
分类号 B24B37/08 主分类号 B24B37/08
代理机构 代理人
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