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发明名称
ORDINARY-PRESSURE CVD DEVICE
摘要
申请公布号
JPH01152275(A)
申请公布日期
1989.06.14
申请号
JP19870312895
申请日期
1987.12.10
申请人
TOSHIBA MACH CO LTD
发明人
ABE HIROAKI;OMURA NOBUHISA
分类号
H01L21/205;C23C16/44;H01L21/31
主分类号
H01L21/205
代理机构
代理人
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