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发明名称
SEMICONDUCTOR HEATING FURNACE TUBE AND PROCESS FOR PRODUCTION OF SAME
摘要
申请公布号
JPS5236977(A)
申请公布日期
1977.03.22
申请号
JP19750112741
申请日期
1975.09.19
申请人
TOUKAI KAABON KK
发明人
AKIYAMA MASARU
分类号
H01L21/205;H01L21/02;H01L21/22;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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