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发明名称
FINE PATTERN FORMING METHOD
摘要
申请公布号
EP0390038(A3)
申请公布日期
1991.11.06
申请号
EP19900105722
申请日期
1990.03.26
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
HASHIMOTO, KAZUHIKO;KOIZUMI, TAICHI;KAWAKITA, KENJI;NOMURA, NOBORU
分类号
G03F7/039;G03F7/09;H01L21/027;H01L21/3205;H01L23/52;(IPC1-7):G03F7/039;C08G75/14;C08G75/23;G03F7/26;H01L21/312;H05K3/02
主分类号
G03F7/039
代理机构
代理人
主权项
地址
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