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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURING PROCESS
摘要
申请公布号
JPS5232679(A)
申请公布日期
1977.03.12
申请号
JP19750109277
申请日期
1975.09.09
申请人
MITSUBISHI ELECTRIC CORP
发明人
KIJIMA KOUICHI
分类号
H01L21/8224;H01L21/302;H01L21/331;H01L27/082;H01L29/08;H01L29/72;H01L29/73
主分类号
H01L21/8224
代理机构
代理人
主权项
地址
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