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发明名称
MANUFACTURING PROCESS OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5232683(A)
申请公布日期
1977.03.12
申请号
JP19750108784
申请日期
1975.09.08
申请人
MITSUBISHI ELECTRIC CORP
发明人
YUKIMOTO YOSHINORI
分类号
H01L29/80;H01L21/265;H01L21/337;H01L29/06;H01L29/808
主分类号
H01L29/80
代理机构
代理人
主权项
地址
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