| 发明名称 |
SEMICONDUCTOR MANUFACTURING PROCESS |
| 摘要 |
PURPOSE:To obtain high-reliability semiconductors which can be processed easily by forming anticorrosion film protecting aluminum pad surface by dry process. |
| 申请公布号 |
JPS5232263(A) |
申请公布日期 |
1977.03.11 |
| 申请号 |
JP19750106981 |
申请日期 |
1975.09.05 |
| 申请人 |
HITACHI LTD |
发明人 |
KACHI TADAO;HAYASAKA AKIO;NITSUTA TAKEHISA;HONMA YOSHIO |
| 分类号 |
H01L21/60;H01L21/28;H01L21/283;H01L21/31 |
主分类号 |
H01L21/60 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
