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发明名称
ELECTRON BEAM PROCESSING DEVICE
摘要
申请公布号
JPS5230996(A)
申请公布日期
1977.03.09
申请号
JP19750107740
申请日期
1975.09.04
申请人
KAGAKU GIJIYUTSUCHIYOU MUKIZAISHITSU KENKIYUUSHIYOCHIYOU
发明人
KAWAI NANAO;TANAKA TAKAO;SAKAUCHI HIDENORI;SHIMIZU RIYUUICHI
分类号
H01J37/06;H01J37/30;H01L21/027
主分类号
H01J37/06
代理机构
代理人
主权项
地址
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