| 发明名称 |
CONTINUOUS PROCESSING SYSTEM FOR SEMICONDUCTOR SUBSTRATES |
| 摘要 |
<p>A manufacturing system utilizing a plurality of satellite functional processing stations or sectors, each capable of stand-alone operation. The stations are interconnected by a handler or conveyor, which will transport individual ones of work-pieces from one processing station to the next in accordance with a prescribed sequence corresponding to the processing requirements for the workpiece.</p> |
| 申请公布号 |
CA1006626(A) |
申请公布日期 |
1977.03.08 |
| 申请号 |
CA19740189832 |
申请日期 |
1974.01.10 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ARONSTEIN, JESSE;HARDING, WILLIAM E. |
| 分类号 |
H01L21/30;B23Q41/06;H01L21/02;H01L21/027;H01L21/50;H01L21/677;H01L21/70 |
主分类号 |
H01L21/30 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
