发明名称 |
A method and an apparatus for generation of a discharge in own vapors of a radio frequency electrode for sustained self-sputtering of the electrode |
摘要 |
PCT No. PCT/SE94/00959 Sec. 371 Date Jun. 21, 1996 Sec. 102(e) Date Jun. 21, 1996 PCT Filed Oct. 12, 1994 PCT Pub. No. WO95/11322 PCT Pub. Date Apr. 27, 1995A method and apparatus for generation of a discharge in own vapors of a radio frequency electrode for sustained self-sputtering and evaporation comprising the steps of: (a) generation of a radio frequency discharge by a radio frequency electrode of a hollow geometry in an auxiliary gas introduced into the discharge area at a pressure necessary for an initiation of a hollow cathode discharge inside the hollow electrode causing sputtering and/or evaporation of the electrode surface; (b) increasing the radio frequency power to said hollow electrode to enhance density of vapors containing particles released from the electrode by the sputtering and/or evaporation in the radio frequency generated hollow cathode discharge up to a density at which a self-sustained discharge remains after the inflow of said auxiliary gas is closed and the pumping of gas is adjusted to a value necessary for the maintenance of the discharge. The hollow radio frequency electrode may serve as an inlet of said auxiliary gas. +Z <IMAGE> |
申请公布号 |
SE9303426(D0) |
申请公布日期 |
1993.10.18 |
申请号 |
SE19930003426 |
申请日期 |
1993.10.18 |
申请人 |
LADISLAV BARDOS;HANA BARANKOVA;SOEREN BERG |
发明人 |
LADISLAV *BARDOS;HANA *BARANKOVA;SOEREN *BERG |
分类号 |
C23C14/34;C23C14/22;C23C14/35;C23C14/40;H01J37/34 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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