Method and apparatus for electro-optic sampling measurement of electrical signals in integrated circuits

摘要

A method for electro-optic sampling measurement of electrical signals in integrated circuits, capable of improving the reproducibility of the measurements and calibrating the voltage accurately. The changes of beam intensity of a laser beam reflected from an electro-optic probe is measured by using a low frequency signal of a known voltage level to determine a relationship between the changes of beam intensity and gaps between the electro-optic probe and the integrated circuit, then a proportionality of the change of beam intensity and an absolute voltage level for a desired gap is determined according to the determined relationship. Then, the change of beam of intensity at a desired measurement position with a desired gap is measured by using a high frequency signal and the absolute voltage level of the high frequency signal is determined according to the measured change of beam intensity and the determined proportionality. The electro-optic probe is positioned by first bringing the electro-optic probe into a contact with the integrated circuit to detect a contact position, and then moving the electro-optic probe away from the integrated circuit to provide a desired gap with respect to the detected contact position regarded as a reference point.