摘要 |
The present invention provides a process for preparing silicon oxide layers on a substrate, and particularly on metal, having improved corrosion-protective properties. This is accomplished by making the silicon oxide protective layer hydrophobic, preferably by incorporating therein hydrophobic organosilicon residues. The protective layers are preferably prepared by vapor deposition in a vessel containing silicon and/or silicon oxides in the gasous form, oxygen, and a organosilicon compound containing at least one hydrophobic group bonded to the silicon. |