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发明名称
FIXATION OF MINUTE SUBSTANCE AND FORMATION OF ELECTRODE
摘要
申请公布号
JPH06252056(A)
申请公布日期
1994.09.09
申请号
JP19930035071
申请日期
1993.02.24
申请人
NEC CORP
发明人
OCHIAI YUKINORI
分类号
H01L21/205;G01R27/02;H01L21/027;H01L21/28;H01L21/285;H01L21/30;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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