| 摘要 |
A magazine carrier drum is mounted within a vacuum housing to receive, at a load position, a magazine of radial arrayed substrate holders which are subsequently advanced seriatim into a carrousel mounted rotatably within a sputtering chamber. The carrousel advances the substrate holders about a centrally disposed cylindrical cathode whereafter the holders with film coated substrates are returned to the magazine carrier drum without breaking vacuum. Shields are provided to insure that each held substrate receives a uniform film deposit of the sputtered material. An arrangement of ducts, ports and shields control the uniform injection and diffusion of an ionizable gas or a mixture of an ionizable gas and a reactive gas. Facilities are also provided to control the cooling of the cathode and the sputtering chamber. |
