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发明名称
摘要
申请公布号	JPS526928(B1)	申请公布日期	1977.02.25
申请号	JP19710022685	申请日期	1971.04.09
申请人		发明人
分类号	C23C18/40;(IPC1-7):C23C3/02	主分类号	C23C18/40
代理机构		代理人
主权项
地址

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