| 发明名称 |
SEMICONDUCTOR MANUFACTURING APPARATUS |
| 摘要 |
PURPOSE:To perform the liquid phase epitaxial growth with excellent reproducibility, by means of constituting the structure which can seal the reaction tube with the fitting ball joint. |
| 申请公布号 |
JPS5225566(A) |
申请公布日期 |
1977.02.25 |
| 申请号 |
JP19750101174 |
申请日期 |
1975.08.22 |
| 申请人 |
OKI ELECTRIC IND CO LTD |
发明人 |
SAKUTA MASAAKI;NONAKA TOSHIO |
| 分类号 |
C30B19/06;C30B29/40;H01L21/20;H01L21/208;H01L21/22;H01L33/30 |
主分类号 |
C30B19/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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