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发明名称
SURFACE INSPECTION DEVICE
摘要
申请公布号
JPS5224554(A)
申请公布日期
1977.02.24
申请号
JP19750100198
申请日期
1975.08.20
申请人
HITACHI LTD
发明人
MATSUMOTO YOSHIO;KUNI TOMOHIRO
分类号
G01N21/88;G01B11/24;G01N21/94;G01N21/952
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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