发明名称 PUMP BONDER
摘要 PROBLEM TO BE SOLVED: To provide a bump bonder which forms a bump by bonding a ball formed at the front end of a wire to the electrode of an IC chip, and can secure high productivity when the number of bumps on each IC chip is small. SOLUTION: Openings 7 which are engaged with the side edges of IC chips 11 arranged in a bump bonder are formed at regular pitch intervals, and a carrying means 1 having an endless belt 5 which is intermittently driven on a stage 2 constituting a carrying route at the above-mentioned regular pitch is provided. On one end side of the carrying means 1, a supplying and transferring means 13 supplies the IC chips 11 into the openings 7 and, at a prescribed position in the middle of the carrying means 1, a bonding head 21 forms bumps on the electrodes of the chips 17 housed in the openings 7. On the other end side of the carrying means 1, in addition, a taking-out and transferring means 17 takes out the chips 11 from the openings 7.
申请公布号 JPH10326785(A) 申请公布日期 1998.12.08
申请号 JP19970133918 申请日期 1997.05.23
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 MAE TAKAHARU;MAYAHARA KIYOSHI;NARITA MASACHIKA;WATANABE MASAYA
分类号 H01L21/60;H01L21/321 主分类号 H01L21/60
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