| 摘要 |
Apparatus for transporting a susceptor carrying semiconductor wafers into and out of a horizontally extending reaction chamber. The apparatus comprises a traveling fork and carriage assembly pivotally mounted on a base for carrying the susceptor into and out of the reactor and lifting the susceptor between raised and lowered positions. Means is included for sensing the presence of a susceptor on the fork assembly and programming the apparatus accordingly for a loading or unloading operation.
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