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发明名称
METHOD OF DETECTING ATTACHING POSITIONS OF SEMICONDUCTOR PELLETS
摘要
申请公布号
JPS5223268(A)
申请公布日期
1977.02.22
申请号
JP19750099292
申请日期
1975.08.15
申请人
SHINKAWA SEISAKUSHIYO KK
发明人
YAMAZAKI NOBUHITO
分类号
H01L21/68;H01L21/60
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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