发明名称 |
Substrates coated with an antihalation layer that contains a resin binder comprising anthracene units |
摘要 |
Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
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申请公布号 |
US5851730(A) |
申请公布日期 |
1998.12.22 |
申请号 |
US19970978827 |
申请日期 |
1997.11.26 |
申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
THACKERAY, JAMES W.;ORSULA, GEORGE W. |
分类号 |
G03F7/004;G03F7/038;G03F7/09;G03F7/11;G03F7/38;H01L21/027;(IPC1-7):G03C1/83 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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