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发明名称
VERFAHREN ZUM STABILISIEREN DER SCHWELLENSPANNUNG VON SILIZIUM-GATE- FELDEFFEKTTRANSISTOREN MIT AUS OXYD/ NITRID-ISOLIERSCHICHTEN ZUSAMMENGESETZTEN GATE-DIELEKTRIKA
摘要
申请公布号
DE2355605(B2)
申请公布日期
1977.02.17
申请号
DE19732355605
申请日期
1973.11.07
申请人
发明人
分类号
H01L29/78;H01L21/28;H01L21/283;H01L21/314;H01L21/316;H01L21/336;H01L29/00;H01L29/51;(IPC1-7):H01L21/324
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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