| 发明名称 |
METHOD OF AND APPARATUS FOR MANUFACTURING COMPOUND THIN FILM |
| 摘要 |
PURPOSE:To provide a means for compound thin film, which is stable over a long period of time and is subject to less fluctuations. |
| 申请公布号 |
JPS5220294(A) |
申请公布日期 |
1977.02.16 |
| 申请号 |
JP19750096932 |
申请日期 |
1975.08.08 |
| 申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
SHIMIZU YASUHIRO;SHINOHARA KOUICHI |
| 分类号 |
C23C14/32;C23C14/54;H01B13/00;H01C17/08 |
主分类号 |
C23C14/32 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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