发明名称 ION MICRO ANALYZER
摘要 PURPOSE:To provide deflecting electrodes between the ion gun and electrostatic lens which are so arranged that their axes are deviated from the center of primary ion convergent lens thereby improving analytical accuracy.
申请公布号 JPS5220090(A) 申请公布日期 1977.02.15
申请号 JP19750095832 申请日期 1975.08.08
申请人 HITACHI LTD 发明人 NAKAMURA KAZUMITSU
分类号 G01N23/225;H01J37/02;H01J37/252 主分类号 G01N23/225
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