| 摘要 |
A solar cell is fabricated having an anti-reflective coating formed of an oxide of niobium, zirconium, hafnium, or tantalum. The oxide is formed by oxidizing a layer of metal deposited on the surface of the semiconductor portion of the solar cell. A pattern for the top electrode of the solar cell is etched into the oxide layer by a technique which includes the formation of a metallic and a photoresist mask and also includes lift-off photolithography. |
