Olefin-SO{HD 2 {B copolymer film adhesion to a substrate

摘要

To improve the adherence of an olefin-SO2 copolymer film employed as an electron beam resist to a metallic substrate, a thin film of gold is first applied to the substrate. The resulting bond is strong enough to withstand exposure to electron beams, development of the resist film and electroplating of the film witout undercutting, lifting or distortion of the film.