| 摘要 |
PURPOSE: A method for manufacturing zinc oxide system thin film for laser by metal organic chemical deposition method is provided to manufacture a zinc oxide system thin film for a laser in large quantities by a metal organic chemical vapor deposition method. CONSTITUTION: A zinc-containing organic metal and an oxygen-containing gas or an oxygen-containing organic matter are injected into a reaction apparatus through different lines. An injection line of the oxygen-containing gas or organic matter is located 1 through 5 cm in front of a center of a substrate surface. A film is grown on a substrate under a cold wall reaction apparatus having a pressure of 1 through 10 torr and a temperature of 250 through 700°C. The zinc-containing organic metal is a dimethyl zinc, a diethyl zinc, a zinc acetate, a zinc acetate anhydride, or a zinc acetyl acetonate. The oxygen-containing gas is O2, O3, NO2, a vapor, or CO2. The oxygen-containing organic matter is C4H8O.
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