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发明名称
摘要
申请公布号
JP3285767(B2)
申请公布日期
2002.05.27
申请号
JP19960197910
申请日期
1996.07.26
申请人
发明人
分类号
H01L23/02;H01L31/0232;(IPC1-7):H01L23/02;H01L31/023
主分类号
H01L23/02
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