CHARGED PARTICLE CONTROL METHOD AND APPARATUS THEREOF

摘要

PROBLEM TO BE SOLVED: To control the energy of individual charged particles in a mixed plasma process so as to selectively fly desired charged particles to the specified spots by controlling the energy. SOLUTION: A charged particle controller comprises a high frequency antenna 3 for generating a plasma space in a rare gas atmosphere, an air-core coil 4 for magnetizing a flight path of charged particles generated in the plasma space at the high frequency antenna 3 to form a magnetic field space, and a rotating field forming antenna 5 for forming an electric field rotating in a plane perpendicular to the flying direction of the particles at an arrival spot of the flying particles over a sheath section self-formed in front of a sample substrate 12.