| 发明名称 |
METHOD TO DETECT A DEFECT IN A TRANSPARENT TEST OBJECT |
| 摘要 |
PURPOSE:To detect a defect on the surface of test object by irradiating two light beams of different incident angles at one point on the surface of a transparent test object. |
| 申请公布号 |
JPS5214477(A) |
申请公布日期 |
1977.02.03 |
| 申请号 |
JP19750090426 |
申请日期 |
1975.07.24 |
| 申请人 |
KONISHIROKU PHOTO IND |
发明人 |
TAKAHASHI TOKUJI;AKIMOTO YUZURU |
| 分类号 |
G01N21/892;G01N21/89;G01N21/896 |
主分类号 |
G01N21/892 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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