| 发明名称 |
POSITIONING METHOD OF THE PHOTOMASK |
| 摘要 |
PURPOSE:To prevent the error of positioning by using light which is produced by removing the bright line in the mercury-arc lamp by the passing the latter through the multilayered thin film having different refractive index. |
| 申请公布号 |
JPS5214369(A) |
申请公布日期 |
1977.02.03 |
| 申请号 |
JP19750090279 |
申请日期 |
1975.07.25 |
| 申请人 |
HITACHI LTD |
发明人 |
NISHIZUKA HIROSHI |
| 分类号 |
H01L21/30;G03F9/00;G05D3/12;H01L21/027;H01L21/302 |
主分类号 |
H01L21/30 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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