| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly precise moving mechanism performing highly precise control sufficiently eliminating interference with the control of a finely moving mechanism and the control of a coarsely moving mechanism. SOLUTION: The highly precise moving mechanism 20 is provided with the roughly moving mechanism 60, the finely moving mechanism 50 having a balance movable part operated in the contrary direction to the operation direction of a drive movable part, and a drive voltage regulating circuit 56 regulating at least one drive voltage and phase of the drive movable part and the balance movable part of the finely moving mechanism 50 so that the reaction force of the movement of the drive movable part is not transmitted to the coarsely moving mechanism. Even when massive balancing of the drive movable part, a mounting table and the like is not completely taken, both are completely balanced because drive voltage supplied to at least one of the drive movable part and the balance movable part is regulated.
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