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发明名称
摘要
申请公布号
JP3301357(B2)
申请公布日期
2002.07.15
申请号
JP19970246193
申请日期
1997.08.26
申请人
发明人
分类号
C23C16/40;C23C16/50;C23C16/509;C23C16/511;H01C10/32;H01J37/32;H01L21/205;H01L21/31;(IPC1-7):C23C16/509
主分类号
C23C16/40
代理机构
代理人
主权项
地址
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