| 摘要 |
The present invention relates to a substrate treatment system and, more specifically, to an aligning module to supply a substrate to a transferring module and a processing module after the substrate is aligned, by being connected to the transferring module and the processing module. The aligning module aligns a horizontal position of two sheets of rectangular substrates while the two sheets of the rectangular substrates are arranged to be parallel in the horizontal direction after the two sheets of the rectangular substrates are placed inside from the outside. The aligning module includes: an aligning chamber having a sealed inner space; multiple substrate support members which are parallel with each other by being installed in the aligning chamber and support the two sheets of the substrates to have a height difference in the vertical direction; and a first aligning unit and a second aligning unit, which are installed in the aligning chamber and individually align the horizontal position of the two sheets of the rectangular substrates supported by the substrate support members. |
