发明名称 |
BEAM ANGLE ADJUSTMENT IN ION IMPLANTERS |
摘要 |
A steering component is included in an ion implantation system to direct or "steer" an ion beam to a scan vertex of a scanning component downstream of the steering component. In this manner, the scan vertex of the scanning component coincides with the focal point of a parallelizing component downstream of the scanning component. This allows the beam to emerge from the parallelizing component at an expected angle so that ions can be implanted in a desired manner into a workpiece located downstream of the parallelizing component.
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申请公布号 |
US2008067442(A1) |
申请公布日期 |
2008.03.20 |
申请号 |
US20070757063 |
申请日期 |
2007.06.01 |
申请人 |
VANDERBERG BO H;WU XIANGYANG |
发明人 |
VANDERBERG BO H.;WU XIANGYANG |
分类号 |
H01J37/08 |
主分类号 |
H01J37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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