PRODUCTION OF X-RAY WINDOW MATERIAL

摘要

PURPOSE:To obtain an X-ray window excellent in the transmission characteristic of low energy X-ray by applying etching to silicon on the rear side of a diamond film formed on a silicon substrate in which boron ions are implanted into reticular state and forming a backup grid. CONSTITUTION:Boron ions are implanted in a single-crystal silicon substrate 1 into reticular state. A thin diamond film 3 is formed on the ion-implanted surface of this silicon substrate 1. Subsequently, etching is applied to the silicon substrate 1 from the side uncoated with the above diamond film 3, and a part 2 in which boron ions are implanted is allowed to remain and formed into a backup grid 5.