| 摘要 |
PURPOSE:To filter a gas laser medium almost in proportion to the repeated operation of a laser oscillation and always keep the inside of a laser tube clean by taking in the gas laser medium by a pressure rise due to a discharge and filtering the gas laser medium. CONSTITUTION:A gas processing tank 20 is provided outside a laser tube 1 and the tank 20 and the tube 1 are connected to each other by an introduction tube 21 and a discharge tube 22. A filter 24 for filtering a dust-like discharge product is provided in the gas processing tank 20. A gas laser medium in a main discharge space 4 is heated by electric energy in a main discharge and a pressure is locally increased by a factor of 2 or 3. A first valve 26 is opened by being pressed by a gas pressure rise and part of the gas laser medium flows into the gas processing tank 20 via the introduction tube 21. By this inflow, a second valve 27 is opened and the inflow is returned to the laser tube 1 via the discharge tube 22. The returned gas laser medium is cleaned by the filter 24. |
