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发明名称
APERTURE MASK OPTICAL SYSTEM
摘要
申请公布号
US3616732(A)
申请公布日期
1971.11.02
申请号
USD3616732
申请日期
1969.11.06
申请人
BUCKBEE-MEARS CO.
发明人
MICHAEL E. RUCINSKI
分类号
H01J9/14;H01J9/227;H01J29/07;(IPC1-7):C23C17/00;B44D1/02
主分类号
H01J9/14
代理机构
代理人
主权项
地址
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