| 摘要 |
<p>1316711 Silica layer MULLARD Ltd 15 March 1971 6884/71 Heading ClA [Also in Divisions C3 and Hl] A layer of silica on substrate is produced by coating the substrate with a mixture of cyclic tri- and tetrasiloxanes, and heating to decompose the coating. The mixture of siloxanes may be obtained by hydrolysing methyltrichlorosilane. The heating may be effected in N 2 , vacuum, O 2 or air, e.g. at 600‹ C. Before heating, the layer is partially irradiated with an electron beam, and the irradiated parts etched.</p> |
