| 摘要 |
PURPOSE:To facilitate the determination of an adequate threshold value by judging the attributes of a plurality of particle patterns based on the threshold value, changing the registered contents when there is contradictions between the results of the attributes which are judged by visual observation and the threshold value, and repeating the computation of the threshold value again based on the change. CONSTITUTION:An operator judges the attributes of patterns by visual observation for all samples whose parameters are computed and stored in a data processing control device 6. The results of the judgments are registered in the device 6 from an input device 9. In the device 6, the parameters and the results of the judgments are compared and operated. The threshold value of the parameter which has the least contradiction is computed. The value is used, and the attributes for all samples are automatically judged. The result is displayed on a display device 10. The operator observes the data on the display device 10 and confirms whether there is the contradiction or not between the result of the visual judgment and the result of the automatic judgment. When, e.g the contradictions are more than an allowable number, the rejudging and the correction for re-registration are performed. when the re-registration is performed, processing is performed again, and the result is displayed 10. Said operation and process are repeated by required times, and the adequate threshold value is determined. Thus the judgment of the pattern is finished. |
